Our laboratory owns advanced experimental equipment for production of nano/micro-machines. We also share large equipment for common use aiming at inter-departmental cooperation.(*:Joint usage)
Measurement equipment
Transmission Electron Microscope (TEM)
MODEL：JEM-2100Plus, JEOL
Scanning Electron Microscope* (SEM)
MODEL：Versa 3D LoVac, FEI
Atomic Force Microscope* (AFM)
MODEL：SPM-9700 / SPM-8100FM, SHIMADZU
- High Speed CCD Camera
- Cryostat
- Axis Pro
MEMS
Clean Room
CLASS：1000
Electron Beam Lithography Exposure
Physical Vapor Deposition Device*
- Wire Bonder
- RF 3-Target Sputtering System